RF MEMS Switching Technology
RF MEMS are built using advanced surface micro-machining fabrication techniques. This results in tiny microscopic mechanical switch structures, which offers the ultimate in RF performance. These tiny RF switches operate in a similar way to conventional RF mechanical relays, but on a much smaller scale (0.2X0.2mm²).
Based on semiconductor fabrication process, RF MEMS technology presents also high integration as above-IC and above-IPD (Integrated Passive Devices) manufacturing capabilities, and the possibility to built devices on top of glass, GaAs, sapphire, SiGe substrates.
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DelfMEMS technology concerns a new generation of RF-MEMS switch. This RF MEMS technology platform is based on key DelfMEMS patents. It consists in an anchorless flexible H-shape membrane simply supported by two pillars with actuation part at each extremity enabling two active states.
Deflected by electrostatic forces, this membrane is used to switch RF signals based on the principle of current electro-mechanical relays / switches. The innovative microstructures enables :
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"White Paper : An Approach of RF-MEMS Technology Platform For Multi-band Multi-mode Handsets"
2011 : DelfMEMS is releasing a white paper entiteld " An Approach of RF-MEMS Technology Platform For Multi-band Multi-mode Handsets ". Overview of key concepts:
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